LIQUOZON® VariO3 for FPD Applications Dissolved Ozone Delivery System for FPD Applications

PublishTime：2022-04-18

■MKS’ LIQUOZON® VariO3 dissolved ozone gas delivery system improves the surface cleanliness and product yield of various process steps in Organic Light EmittingDiode (OLED) and Flat Panel Display (FPD) manufacturing.Carbon and metallic contamination of low-temperature polycrystalline silicon (LTPS) surfaces are effectively removed with MKS’ VariO3 system using a substrate rinsing method that can prevent up to 80% of total yield loss due to contaminated surfaces prior to excimer laser annealing (ELA).
■The VariO3 system provides user controllable and configurable dissolved ozone concentrations at high flow rates and pressure and is available with 1-4 dissolved ozone outlets. Equipped with a green idle mode, the system reduces excess water usage. The modular and versatile mechanical system interface makes it easy to integrate and service in today’s equipment facilities and meets the latest safety and monitoring requirements.
■DI-O3 improves cost of ownership (CoO) of the LTPS cleaning step and is more environmentally friendly than alternate cleaning methods like RCA and SPM. Using dissolved ozone during the LTPS process improves electron mobility, lowers leakage currents and lowers threshold voltages for Thin Film Transistors (TFTs), improving battery usage in OLED displays.
●Product Features
■140 lpm DI-O3 flow rate
■High outlet pressure compatibility, up to 3 barg
■High purity ozone environment
■Integrated reference measurement for DI-O3
■Variable CO2 doping
■Easy installation and operation
●Key Benefits
■Improves yield by effectively removing metallic and carbon contamination in LTPS applications
■Significantly improves cleaning process cost of ownership over alternate methods
■Number of outlets, pumps, filters, and sensors can be tailored to meet individual customer needs

Brand of Product：	MKS Instruments
Part#：
Product Category：	VariO3 dissolved ozone gas delivery system More
Application：	[ FPD Applications ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	8/21
Version Number：
Data Encoding：
Data Size：	2.2 MB

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