Static Mixer A Contractor For Dissolving Ozone Gas In Fluids

PublishTime：2022-04-18

■The Static Mixer efficiently dissolves various gases under pressure. Both gas and fluid are injected into the Static Mixer while a series of baffles converts kinetic energy into turbulence, resulting in improved mixing and solution. The standard static mixer supports ultrapure water or sulphuric acid fluids while the PFA/PTFE versions support other chemistries including water containing hydrofluoric acid. Common applications include the solution of ozone gas in fluids for photoresist strip or for cleaning steps in semiconductor wet wafer processing.
●Product Features
■High efficiency mass transfer for maximum dissolved ozone
■Quartz and PFA/PTFE versions available to accommodate multiple chemistries
■Flaretek or Pillar compatible fittings available (Pillar only for PFA/PTFE version)
■No consumable parts
●Key Benefits
■Contamination free mixing
■Small size for easy installation
■Reliable design provides lower total cost of ownership

Brand of Product：	MKS Instruments
Part#：
Product Category：	Static Mixer More
Application：	[ semiconductor wet wafer processing ][ photoresist strip ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	8/21
Version Number：
Data Encoding：
Data Size：	2.1 MB

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