SEMOZON® AX8555 STAND-ALONE OZONE DELIVERY SYSTEM FOR ADVANCED PROCESSES

PublishTime：2022-04-18

■The SEMOZON® AX8555 Ozone Delivery Subsystem supports multiple chambers or tools to provide ultraclean, high concentration ozone gas using the SEMOZON AX8560 Ozone Delivery Subsystem. The SEMOZON AX8555 is also a fully integrated, high output ozone gas delivery system specifically designed for advanced semiconductor process applications such as Atomic Layer Deposition (ALD). ALD is a self-limiting “pulsed” process that sequentially introduces reactants into the process chamber in the gas phase to build successive monolayers of film on the wafer. By appropriately selecting the precursor materials, parameters such as growth rate, reaction temperature, impurity levels, and crystallinity of the deposited films can be influenced. Films grown using ozone as an oxidizer in ALD are very high quality, stoichiometric, uniform, dense and free from any significant contamination.
●Features & Benefits
■Superior Process Control for Higher Yields
▲Specifically designed for lower flow, high ozone concentration
◆Required for advanced applications such as ALD
▲Closed-loop concentration for tighter process control
▲Ultraclean ozone at ultrahigh concentration
■Flexibility
▲Modular design
◆Each channel can be process matched to different concentration and flow
▲Optional integrated ozone destructs with bypass valve
◆Multiple configurations available
▲Flexible Tool Interface
◆Interlock interface assembly configures easily to OEM tools
■Clean, Safe Alternative to Conventional Chemical Processing
▲High redox potential
▲Generated at point-of-use
▲Green chemical, easily converted back to oxygen
■Low Cost of Ownership
▲Reduced chemical consumption and disposal costs
▲Supports single or multiple process tools for maximum efficiency
▲Compact footprint
■Proven Reliability
▲MKS patented, field-proven ozone generating technology

Brand of Product：	MKS Instruments
Part#：	AX8555 、 AX8560 More Part#
Product Category：	STAND-ALONE OZONE DELIVERY SYSTEM 、 fully integrated, high output ozone gas delivery system More
Application：	[ semiconductor process applications ][ Atomic Layer Deposition (ALD) ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2/18
Version Number：
Data Encoding：
Data Size：	341 KB

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