1579A Digital Mass Flow Controller for High Flow Rates
●This MFC is available with either analog or digital (Profibus) I/O. The digital control electronics utilize MKS control algorithms providing fast and repeatable response to set point.
●The 1579A has settling times of <1 second and set point accuracies below 1% of Full Scale that outperform those of other typical high flow MFCs. Precise control is maintained down to 2% of the 1579A configured Full Scale flow range.
●Both analog and Profibus versions incorporate a flexible power system that allows either ±15 VDC or +24 VDC power supplies to be used. This allows the user to choose the most effective method of powering the unit for his application. Additionally, the analog variant of the 1579 is equipped with a digital interface that provides access to setup functions and diagnostics through the use of proprietary software.
●Continuing development of both electronics and flow design have enabled MKS Instruments to develop andproduce a compact, robust device with excellent accuracy and settling time.
●Product Features
■Full Scale flow ranges from 50 slm to 300 slm
■Dual voltage power input; +24 VDC or ±15 VDC
■Controller settling time less than 1 second
■Analog or analog and Profibus DP Communications
■1% Full Scale accuracy with % reading optional
●Key Benefits
■Compact design
■Multi-gas/Multi-range capability for up to 15 gases
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Digital Mass Flow Controller 、 high flow, elastomer sealed Mass Flow Controller (MFC) |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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10/21 |
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2.4 MB |
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