R-Series Gate Valve
●The MKS R-Series Gate Valve is optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R-Series is available with a range of options, including pneumatic and manual actuators, lockout tagout capability, and position indicators. The R-Series employs an elastomer shaft seal for the actuator seal, which enables high performance in a cost effective, high value package for roughing vacuum applications.
●Product Features
■Excellent temperature uniformity ensures no cold spots on internal surfaces
■Prevents condensation of effluents and corrosive gases
■DN80 and DN100 > 200,000 cycles
■DN160 > 100,000 cycles
■DN80, DN100 and DN160mm sizes available
[ Roughing Pump Isolation ][ Semiconductor SubFab ][ General Vacuum Applications ] |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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09/20 |
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643 KB |
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