R-Series Gate Valve

2022-04-21
●MKS Instruments, a leader in high reliability and high performance vacuum isolation and pressure control valves, introduces the R-Series Gate Valve product line.
●The MKS R-Series Gate Valve is optimized for isolation of roughing pumps and roughing lines in both semiconductor and general vacuum applications. The R-Series is available with a range of options, including pneumatic and manual actuators, lockout tagout capability, and position indicators. The R-Series employs an elastomer shaft seal for the actuator seal, which enables high performance in a cost effective, high value package for roughing vacuum applications.
●Product Features
■Excellent temperature uniformity ensures no cold spots on internal surfaces
■Prevents condensation of effluents and corrosive gases
■DN80 and DN100 > 200,000 cycles
■DN160 > 100,000 cycles
■DN80, DN100 and DN160mm sizes available

MKS Instruments

R-SeriesGVRAD100SSPVNN20

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Part#

Gate Valve

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Roughing Pump Isolation ]Semiconductor SubFab ]General Vacuum Applications ]

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Datasheet

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Please see the document for details

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09/20

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