Microvision 2 Stability, Accuracy and Speed

PublishTime：2022-04-21

●Whether your application is leak checking a sputtering chamber, obtaining the highest vacuum possible in a synchrotron or precisely controlling a thin film deposition layer, the cost of not understanding the details of the gases in your vacuum chamber can be very expensive. During the last decade residual gas analysis (RGA) has evolved into a rugged sensor technique, integrated into automated process control environments to provide vital information to engineers on errors within the process and warn when parameters are starting to move out of control.
●Microvision 2 is the latest innovation in RGA technology from MKS, designed to meet all of the traditional requirements for an RGA sensor but with data collection at speeds unachievable with previous generation technologies. In addition, the Microvision 2 is designed to collect dataat millisecond speeds per data point even when measuring data over the full dynamic range of the RGA. This capability has been achieved without sacrificing any of the necessary robustness, reliability and support which have made MKS the world leader in RGA products over the widest range of applications from semiconductor tools or particle accelerators to general industrial applications.
●Product Features
■The constant challenges for RGA technology are to:
▲Provide the highest sensitivity measurements of the gas species present in a vacuum
▲Have robust sensors that keep working even in harsh process environments
▲Acquire the highest quality of data at the fastest possible speeds
▲Integrate seamlessly into the widest possible range of hardware and software systems

Brand of Product：	MKS Instruments
Part#：	Microvision 2 More Part#
Product Category：	More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	12/21
Version Number：
Data Encoding：
Data Size：	4.4 MB

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