Series 390 Micro-Ion® ATM Module

PublishTime：2022-04-18

■The Micro-Ion® ATM module combines proven Micro-Ion ionization gauge technology with a miniature Conductron heat loss sensor and two Piezo resistive sensors to provide accurate, continuous pressure measurement from high vacuum to atmosphere. Using its diaphragm sensors, this product is capable of providing accurate absolute pressure up to atmosphere along with precise indication of vacuum chamber differential pressure from ambient. The unique sensor design eliminates thermal effects that can influence the performance of the heat loss sensor at higher pressures. This small module combines all four sensors and control electronics in a compact modular design, reducing the number of gauges required on a chamber and minimizing the required space. The full range pressure measurement is output as a single analog signal or available through optional EtherCAT®, RS-485 or DeviceNet™ interfaces. The Series 390 is offered with versions having two or three optional set point relays that can be configured for process control, with the ability to assign the relays at any pressure across the vacuum pressure range or to a specific differential pressure value.
■Traditionally, accurate measurement across a wide vacuum range required multiple sensors, multiple vacuum system ports, associated cables and electronics. The Micro-IonATM module combines multiple sensors in one microprocessor-based design, reducing overall cost of ownership, while enhancing vacuum measurement performance.
■Over 20 years of successful Granville-Phillips® vacuum gauge designs and field installations have been applied to produce a new standard in vacuum measurement; the Micro-Ion ATM module. The wide range, high performance, and compact design of the Micro-Ion ATM make it a wise choice for pressure measurement in high vacuum systems.
●Product Features
■Continuous pressure measurement from high vacuum to atmosphere
■Precision differential pressure measurement at atmosphere
■Eliminates need for discrete atmospheric switches and for three separate sensors
■Dual ionization gauge filaments increase equipment uptime
■Automation of ionization gauge activation and deactivation
■Optional set point relays for process control
■Field-replaceable gauge assembly
■Analog, EtherCAT, RS-485 or DeviceNet output available
■Optional graphics LCD display
●Key Benefits
■Wide pressure measurement range
■Atmospheric switching
■Combination of three sensor technologies

Brand of Product：	MKS Instruments
Part#：	Series 390 、 390 、 390710-2-YG-T 、 390510 、 390511 、 390610 、 390611 、 390710 、 390100-Y-E 、 390100 More Part#
Product Category：	Micro-Ion ATM Module More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	10/21
Version Number：
Data Encoding：
Data Size：	2.8 MB

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