Series 392 Micro-Ion® Plus Module

PublishTime：2022-04-18

■The 392 Micro-Ion® Plus is a second generation full range pressure measurement module that combines industry-standard Micro-Ion® ionization gauge technology with a miniature Pirani Conductron heat-loss sensor. The Series 392 Micro-Ion Plus combines Granville-Phillips® industry-standard and application-tested Micro-Ion ionization sensor with an innovative miniature Pirani Conductron sensor in a single gauge assembly envelope that is attached to a compact electronics control module. This compact modular design reduces the number of separate gauges, vacuum interfaces, cabling and control electronics that are typically required for full range pressure measurement. The full range pressure measurement is output as a single analog signal or is available through optional EtherCAT®, RS-485 or DeviceNet™ interfaces. Up to three optional set point relays are available, they can be configured for process control with the ability to assign the relays at any pressure across a broad vacuum spectrum. The Series 392 Micro-Ion Plus is available with or without display, and can be configured with a wide variety of flanges.
■This second generation Micro-Ion Plus has integrated gauge assembly electronic memory that contains factory-calibration information. The electric memory is used by the control module to provide factory-level calibration accuracy for new and replacement gauges, and track gauge-tube usage information so the MKS service team can quickly understand your application environment. The miniature Pirani Conductron delivers improved accuracy through better thermal management within the gauge envelope. Finally, the Series 392 and Series 390 Micro-Ion ATM now share a common platform for improved product quality through high- volume manufacturing.
■Accurate measurement across a wide vacuum range often requires multiple gauge components, additional vacuum ports, associat-ed electrical interfaces and control systems. The Micro-Ion Plus full-range vacuum module combines multiple sensors into a single gauge tube that connects to an advanced control electronics module to create a compact modular gauge design simplies interface requirements as well and reduces overall cost of ownership, while enhancing vacuum measurement performance.
■The next-generation Micro-Ion Plus incorporates knowledge gained through 30 years of vacuum gauge designs and field installations, as well as our extensive work with Original Equipment Manufacturer (OEM) and end-user customers. For high-performance, full range vacuum measurement in a compact single vacuum port design with a low cost of ownership, select the Series 392 Micro-Ion Plus or choose from our full range of MKS pressure measurement solutions.
●Product Features
■Compact multi-sensor gauge design
■Eliminates the need for two independent gauges
■Automation of ionization gauge activation and deactivation
■Optional Analog, EtherCAT®, RS-485 or DeviceNet interfaces
■EtherCAT, RS-485 and DeviceNet have optional set point relays for process control
■Optional flange configurations
■Electronic gauge-tube memory ensures accuracy and repeatability of placement gauges
■Improved miniature Pirani Conductron accuracy
■Second generation product that leverages 30 years of Granville-Phillips vacuum gauge design experience
■Backed by MKS service support program
●Key Benefits
■Accurate, continuous pressure measurement from high vacuum to atmosphere
■Dual ionization gauge filaments increase equipment uptime
■Field-replaceable gauge assembly for low cost-of-ownership

Brand of Product：	MKS Instruments
Part#：	Series 392 、 392 、 Series 390 、 390 、 392710-2-YG-T 、 392501 、 392502 、 392601 、 392602 、 392710 、 392100-Y-E 、 392100 More Part#
Product Category：	full range pressure measurement module 、 Micro-Ion Plus Module More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	10/21
Version Number：
Data Encoding：
Data Size：	2.3 MB

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