Series 901P MicroPirani™ / Piezo Load Lock Transducer

PublishTime：2022-04-18

■Designed specifically for the load lock environment, the Series 901 Plus (901P) Load Lock Transducer (LLT) combines Piezo and MicroPirani™ sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides patented, gas independent absolute pressure measurement from 50 -1000 Torr with increased accuracy over thermal conductivity sensors.
■Unlike traditional Pirani gauges, the sensor element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 901P can read pressures down to 10-5 Torr, two decades below a standard Pirani sensor. The sensor design minimizes the effects of convection, subsequently the 901P can be mounted in any orientation without compromising accuracy.
●Product Features
■Functionality of three sensors in a single transducer for space savings and wide measurement range
■Ultra compact design
■Accurate absolute pressure measurement from 1,000 to 10-5 Torr
■Gas independent absolute pressure measurement from 50 to 1,000 Torr
■Accurate atmospheric pressure reading, independent of gas type and barometric pressure changes
■Fast, accurate and repeatable pressure measurements reduces process cycle time
■Mountable in any orientation for ease of installation; no loss of measurement accuracy
■Optional integrated touch-screen display available for local pressure indication, etc.
■MicroPirani™ solid state sensor is resistant to damage from air inrush or vibration
■Three set points with fast response time for reliable process control (optional)
■Ease of operation via analog output, RS232, RS485, and EtherCAT
■Setup, diagnostic and operation software available
■Alternate analog output and electrical connectors available to match other vendors’ gauges and facilitate an easy upgrade

Brand of Product：	MKS Instruments
Part#：	Series 901P 、 901P 、 901P-11030 、 Series 901 、 901 More Part#
Product Category：	Piezo Load Lock Transducer More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	01/20
Version Number：
Data Encoding：
Data Size：	559 KB

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