Ozone Gas Destruct Safe Destruction of Excess Ozone Gas

2022-04-18
■O3 and DI-O3 are widely used in Semiconductor and Electronic Thin Film applications for contaminant removal and surface conditioning. Whenever ozone is used, safety measures have to be taken in order to protect personnel and equipment from unintended exposure. MKS’ OVS Ozone Gas Destruct unit is designed to safely convert high levels of ozone in to oxygen. This is achieved by the use of a catalyst, which reduces the ozone level down to detection limit - well below safety thresholds.
■For moist ozone gas applications, such as after contacting fluids, the OVS can be supplied with optional heating. The heating ensures that the temperature is always maintained above the dew point, avoiding condensation.
■The OVS is available in two models. OVS 1 destroys up to 102 grams per hour of ozone and is available in a heated version. The OVS 4 destroys up to 324 grams per hour of ozone and is available in either a heated or unheated version.
●Product Features
■Models available for dry or moist ozone environments
■Double-shell design for personnel protection
■High-quality, ozone resistant materials
■Compact design
●Key Benefits
■Catalytic converter for safe transformation of excess ozone process gas to oxygen
■Easy installation

MKS Instruments

OVS 1OVS 4

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Part#

Ozone Gas Destruct Catalytic Converter

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Semiconductor applications ]Electronic Thin Film applications ]contaminant removal ]surface conditioning ]

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Datasheet

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Please see the document for details

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08/21

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