LIQUOZON® VariO3 Dissolved Ozone Delivery System

PublishTime：2022-04-18

■The LIQUOZON® VariO3 dissolved ozone gas delivery system removes organic, metallic and particle contamination in Semiconductor and Electronic Thin Film applications like contaminant removal and surface conditioning via wet clean or rinsing methods. The VariO3 provides high purity ozone in ultrapure water and is equipped with a green idle mode to reduce excess water usage. Designed with MKS’ proprietary contact system, the VariO3 is highly efficient, delivering >80% ozone mass transfer. The system supports a wide operational window with tight process control.
■Users can configure and control dissolved ozone concentrations and flow rates. The VariO3 has analog and digital bidirectional communication with remote control capability. The modular and versatile mechanical system interface makes it easy to integrate and service in today’s equipment facilities and meets the latest safety and monitoring requirements.
●Product Features
■Eliminates environmental waste impact with easy conversion back to oxygen
■<5% concentration accuracy at constant flow rates typical
■Analog and digital bidirectional communication with remote control
■ High purity ozone environment
■Easy installation and operation
●Key Benefits
■Ensures high purity surfaces by removing organic, metallic and particle contamination
■Unit to unit control for provides repeatable process performance
■Cost effective water, power and chemical consumption management reduces operational spending

Brand of Product：	MKS Instruments
Part#：
Product Category：	VariO3 dissolved ozone gas delivery system More
Application：	[ Semiconductor applications ][ Electronic Thin Film applications ][ contaminant removal ][ surface conditioning ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	8/21
Version Number：
Data Encoding：
Data Size：	2.2 MB

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