DI-NH3 Dissolved Ammonia Delivery System

PublishTime：2022-04-18

■MKS’ DI-NH3 is a compact, stand-alone system providing dissolved ammonia water. With Semiconductor 3D IC architectures using new materials like Cu-Co and Si-SiGe, the ability to wet clean with precise alkaline chemistries is growing in frequency and importance. Inhibiting Electrostatic Discharge (ESD), the DI-NH3 delivers dissolved ammonia providing optimal cleaning capability in an alkaline chemistry, minimizing material loss and contamination. Using closed-loop control, conductivity and pressure are kept stable under changing flow conditions. The dissolved ammonia conductivity is monitored and adjusted, delivering the specific NH4OH concentration needed. Dissolved ammonia’s alkaline chemistry provides ESD protection during rinsing, particle lift-off, and residual photoresist removal in middle-of-line (MOL) and prevents corrosion of cobalt/copper interfaces.
■MKS’ DI-NH3 leverages the established and proven architecture of LIQUOZON®, integrating high purity standard materials and safety features in a rugged system to meet the demands of advanced technology manufacturing.
●Product Features
■Leading Technology
▲Patented system to deliver dilute NH4OH based on ammonia gas ultra-pure water mixing
▲Precise gas dosage through proprietary mass flow controller system
■Process
▲Precise conductivity control in range from 5 to 40 μS/cm
▲Up to 40 lpm flow
▲Stable setpoint at varying flow rates
▲Analog and digital communication with remote control
■Reliability & Maintenance
▲Repeatable unit to unit performance
▲Field proven sub-components life
▲Easy installation and operation
●Key Benefits
■Best dynamic conductivity control and accuracy at point of use from proprietary control of gas
■Increases yields by inhibiting Electro Static Discharge
■Improves interconnect reliability and yield by preventing metal surface and post CMP clean corrosion
■Cost effective water, power and chemical consumption reduces operating costs

Brand of Product：	MKS Instruments
Part#：
Product Category：	compact, stand-alone system 、 Dissolved Ammonia Delivery System More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	05/20
Version Number：
Data Encoding：
Data Size：	570 KB

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