ProE-Vap® 10 0 Delivery System
●The ProE-Vap delivery system allows for higher transport of solid precursors at lower temperatures more consistently than other vaporizers, thus reducing cost of ownership for ALD and CVD.
●It minimizes chemical concentration drifts, allowing for higher wafer throughput with less tool downtime. The ProE-Vap has demonstrated high reliability and robust performance in high-volume manufacturing environments since 2008. It supports delivery of a variety of inorganic and transition metal precursors required in the fabrication of highly complex microelectronic device fabrication.
●Available in multiple configurations for installation on different OEM tool sets.
[ High-κ capacitors ][ gate dielectrics ][ Metal barriers ][ electrodes ][ Fluorine-free tungsten ][ FFW ] |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/7/8 |
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730 KB |
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