Jalapeño Vacuum Isolation Valves Thermal Management System
2022-04-18
■Jalapeño Vacuum Valves are specifically designed to withstand high internal temperatures to limit process by-product buildup and reduce system maintenance. The valves are specially designed with a thermal barrier between the actuator and the stainless-steel housing, insulating the internal wetted surfaces, greatly improving thermal performance. The Jalapeño Series has a separate thermal barrier located between the valve housing and the valve body. The valves feature spring-to-close, air-to-open pneumatic operation and are available in port diameters ranging from 1 inch to 4 inches. The MKS Jalapeño LoPro™ Series actuator cap is made entirely of a high-quality polymer to provide a superior thermal barrier for the valve housing.
■The Jalapeño Vacuum Valves are heated with MKS’ Series 49UL heater system. The heater has a set point temperature of 170°C and typically reaches set point temperature in less than 30 minutes. The heaters can be daisy-chained with integral locking connectors and are available in either polyimide or PTFE-woven materials. The heaters are wired in parallel and independently controlled. A power cord is required for every 10 amps drawn by a chain of heaters.
■MKS proven high temperature valve technology, when combined with advanced heater control methods and new, high quality, high temperature heater materials create a one stop solution for heated process isolation in rough vacuum to high vacuum applications. MKS Jalapeño Vacuum Valves can be used in ALD, CVD, PECVD, MOCVD, LPCVD, Etch, Epitaxy, and Gauge Trees applications.
●Product Features
■Seal type
▲Viton®
▲Chemraz®
■Available flange sizes of NW25, 40, 50, 80, 100
■Spring-to-close, air-to-open pneumatic operation
●Key Benefits
■Maintains optimal valve conductance ensuring materials don’t solidify and clog the system
■Actuator thermal barrier design improves internal thermal performance and reduces external temperature to safe touch levels
■Formed bellows-sealed poppet valve reduces particle trapping resulting in high cycle life Valve
■The Jalapeño Vacuum Valves are heated with MKS’ Series 49UL heater system. The heater has a set point temperature of 170°C and typically reaches set point temperature in less than 30 minutes. The heaters can be daisy-chained with integral locking connectors and are available in either polyimide or PTFE-woven materials. The heaters are wired in parallel and independently controlled. A power cord is required for every 10 amps drawn by a chain of heaters.
■MKS proven high temperature valve technology, when combined with advanced heater control methods and new, high quality, high temperature heater materials create a one stop solution for heated process isolation in rough vacuum to high vacuum applications. MKS Jalapeño Vacuum Valves can be used in ALD, CVD, PECVD, MOCVD, LPCVD, Etch, Epitaxy, and Gauge Trees applications.
●Product Features
■Seal type
▲Viton®
▲Chemraz®
■Available flange sizes of NW25, 40, 50, 80, 100
■Spring-to-close, air-to-open pneumatic operation
●Key Benefits
■Maintains optimal valve conductance ensuring materials don’t solidify and clog the system
■Actuator thermal barrier design improves internal thermal performance and reduces external temperature to safe touch levels
■Formed bellows-sealed poppet valve reduces particle trapping resulting in high cycle life Valve
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