MegaTorr® PS6 Oxygen Gas Purifiers

PublishTime：2022-10-24

The catalyst and adsorber MegaTorr® PS6 Series oxygen gas purifiers are enhanced, optimized designs providing sub-ppb performance in compact footprints.
Entegris has drawn on years of experience in ultra-high purity (UHP) piping design, advanced process material analysis, and state-of-the-art integrated control systems to develop this family of purifiers to meet the needs of low capital cost, high reliability, and high performance.

Brand of Product：	Entegris
Part#：	PS6 、 PS6 Series 、 PS6-MGT15-O 、 PS6-MGT30-O 、 PS6-MGT60-O 、 PS6-MGT100-O 、 PS6-MGT200-O 、 PS6-MGT300-O 、 PS6-MGT400-O 、 PS6-MGT500-O More Part#
Product Category：	Oxygen Gas Purifiers More
Application：	[ Semiconductor ][ Data storage ][ Flat panel display ][ LED ][ Solar ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	0821
Version Number：
Data Encoding：	7242-11582ENT
Data Size：	188 KB

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