Analytical Services ASML™ Equipment and Environmental Testing

PublishTime：2022-07-04

●Entegris Analytical Services is the leader in the measurement of airborne molecular contamination (AMC) for semiconductor cleanrooms, photolithography applications, and OEM compliance.
●Based on more than 30 years of service and chemical filter development, Analytical Services is one of more than 30 Global Entegris Labs and provides state-of-the-art AMC analysis for ASML™ tool environment compliance to ensure confident operation of DUV scanners and their chemical filter and purifier systems

Brand of Product：	Entegris
Part#：	ESI005403-03 、 ESI005403-04 、 ESI005403-05 More Part#
Product Category：	More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2021/10/7
Version Number：
Data Encoding：
Data Size：	1.1 MB

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