VaporSorb™ CSP-32 Chemical Air Filters

PublishTime：2022-06-29

●Entegris is a leader in airborne molecular contamination (AMC) control for the microelectronics industry. Our VaporSorb™ CSP-32 chemical air filters offer advanced protection for exposure tool optics and photoresists. CSP-32 filters contain a unique combi-nation of carbon and polymeric chemical media that targets and removes molecular acids (such as HCl, H2SO4, and HNO3), acid forming species (such as SO2), molecular bases (such as NH3, NMP, and amines), and condensable organic compounds defined as those with boiling point greater than 150°C (302°F) and/or molecular weight greater than 120.
●Designed specifically for use in Entegris’ custom filter housings such as the E1250, Ex2600, and E3000, VaporSorb CSP-32 filters are used in serial array to provide unparalleled protection against unplanned and elevated contamination events, including accidental solvent and developer chemical spills.
●FEATURES & BENEFITS:
■Highly activated carbon plus advanced polymeric media
▲Removes acids, bases, and condensable organics in each filter cell
■Pleated filter design in rigid, deep frame
▲Optimizes active component surface area for maximum utilization and efficiency
■Low pressure drop
▲Enables serial filter layout and multiple levels of protection
■Interstack sample ports and serial filter arrangement
▲Allow filter performance monitoring without jeopardizing photoresist or exposed optical surfaces

Brand of Product：	Entegris
Part#：	CSP-32 、 ESI004670-01 、 ESI004842-01 、 ESI004421-01 、 ESI000980 、 ESI004802-01 、 ESI002117-BX More Part#
Product Category：	Chemical Air Filters More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2020/6/1
Version Number：
Data Encoding：
Data Size：	231 KB

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