Chambergard™ FV50D XL Fast Vent Diffuser
●Our Chambergard™ family of products provides rapid venting to atmosphere without disturbing or adding particles to wafers in the chamber. They combine the flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput. With our global infrastructure we can provide Chambergard fast vent diffusers to meet your needs worldwide.
●FEATURES & BENEFITS:
■Rated at 1,000,000 cycles:Designed to operate at higher inlet pressures compared to first-generation Chambergard products
■Industry-leading, patented, sintered nickel technology in a compact diffuser unit:Provides superior performance in all applications
■Removal of particles greater than 0.0015 μm from incoming gas:Minimizes defects on wafer
■Easy installation/retrofit into existing tools:Minimizes downtime (including load lock chambers, cooling chambers, transfer chambers and process chambers)
■Manufactured, tested and packaged in a cleanroom Assures product cleanliness at time of installation
■Rapid vent, gentle flow to atmosphere:Decreases cycle time, increases throughput and Overall Equipment Effectiveness (OEE)
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2021/1/20 |
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235 KB |
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