Pegasus™ 100 Series Coatings
●Pegasus 100 series coatings can be deposited on aluminum, alumina, stainless steel and other commonly used substrate materials, with superior adhesion. These coatings are high purity, exhibit homogeneous microstructure and are conformal to the substrate surface.
●Entegris’ Pegasus 100 series coatings are excellent barriers to corrosive chemistries in a semiconductor etch environment, protecting surfaces from erosion and minimizing particle generation. These coatings have the highest etch/erosion resistance in fluorine plasma environments. They are highly dense compared to plasma sprayed coatings, microcrystalline and conformal, which improves device yield and the productivity of semiconductor etch tools in a manufacturing environment.
●FEATURES & BENEFITS:
■Fluorine etch resistance
■Oxidation resistance
■Low particle generation
■Dense and transparent
|
Datasheet |
|
|
|
|
Please see the document for details |
|
|
|
|
|
|
|
|
|
|
|
English Chinese Chinese and English Japanese |
|
|
2016/9/13 |
|
|
|
|
|
|
|
|
208 KB |
- +1 Like
- Add to Favorites
Recommend
- New Release of the MUSES100 Series, the First Power Management IC in the MUSES Series, Optimized for High Sound Quality
- Keysight Introduces High Density Source Measure Unit PZ2100 Series to Speed Semiconductor Characterization
- Xsens MTi-100 Series IMU Sets New Benchmark for Indoor Position Measurement Accuracy in UWB Beacon System
- Sunlord Developed Mini Size and Ultra-high Q Wire Wound Chip Ceramic Inductor-MWSD0603C/0804C Series
- Compared to traditional semi-rigid cable, Focusimple FSD series reduce the attenuation by 30%, and the temperature phase decreased by 100%
- TAD30/TSD30 Series AC/DC Power Supply Has 30 Watts Output Power and Low Leakage Current under 100μA
- SLKOR Achieved Revenue Growth of over 100% in 2023
- 100,000 P/E Cycles Reached, Apacer’s 3D NAND SSDs Deliver the Highest Endurance Available
All reproduced articles on this site are for the purpose of conveying more information and clearly indicate the source. If media or individuals who do not want to be reproduced can contact us, which will be deleted.
Integrated Circuits
Discrete Components
Connectors & Structural Components
Assembly UnitModules & Accessories
Power Supplies & Power Modules
Electronic Materials
Instrumentation & Test Kit
Electrical Tools & Materials
Mechatronics
Processing & Customization
