Pegasus™ 100 Series Coatings
●Pegasus 100 series coatings can be deposited on aluminum, alumina, stainless steel and other commonly used substrate materials, with superior adhesion. These coatings are high purity, exhibit homogeneous microstructure and are conformal to the substrate surface.
●Entegris’ Pegasus 100 series coatings are excellent barriers to corrosive chemistries in a semiconductor etch environment, protecting surfaces from erosion and minimizing particle generation. These coatings have the highest etch/erosion resistance in fluorine plasma environments. They are highly dense compared to plasma sprayed coatings, microcrystalline and conformal, which improves device yield and the productivity of semiconductor etch tools in a manufacturing environment.
●FEATURES & BENEFITS:
■Fluorine etch resistance
■Oxidation resistance
■Low particle generation
■Dense and transparent
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/9/13 |
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