Caerus™ 100 Series Coatings Superior aluminum oxide coating
●Caerus 100 series coatings can be deposited on aluminum, quartz, alumina, stainless steel and other commonly used substrate materials, including polymers and organic compounds. These coatings are of the highest purity, have amorphous microstructure and are extremely conformal to the substrate surface, which enables coatings on surfaces with high aspect ratio features and complex 3-dimensional parts.
●Entegris’ Caerus 100 series coatings have good cohesive strength and are excellent barriers to corrosive chemistries in semicon-ductor plasma etch and wet etch environments, protecting surfaces from erosion and minimizing particle generation.
●Caerus 100 series coatings are an excellent choice for applica-tions requiring a combination of mechanical, chemical and electrical resistance.
●FEATURES & BENEFITS:
■Dense, highly conformal, pinhole free
■Excellent electrical properties
■Good chemical etch resistance
■Diffusion barrier layer
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[ Semiconductor chamber components ][ Optical coatings ][ Parts with high aspect ratio features and complex 3-dimensional surfaces ] |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2017/8/1 |
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