SPECIALTY GASES AND ENGINEERED MATERIALS
APPLICATIONS
—
• Semiconductor chamber components
FEATURES & BENEFITS
—
• Fluorine etch resistance
• Oxidation resistance
• Low particle generation
• Dense and transparent
Pegasus
™
100
Series Coatings
Fluorine etch-resistant coatings
Entegris’ Pegasus
™
100 series coatings are a family of precision-
engineered PVD coatings tailored for fluorine plasma etch
applications. Pegasus 100 series coatings are Yttrium-based
oxide coatings deposited at low temperatures.
Pegasus 100 series coatings can be deposited on aluminum,
alumina, stainless steel and other commonly used substrate
materials, with superior adhesion. These coatings are high purity,
exhibit homogeneous microstructure and are conformal to the
substrate surface.
Entegris’ Pegasus 100 series coatings are excellent barriers to
corrosive chemistries in a semiconductor etch environment,
protecting surfaces from erosion and minimizing particle
generation. These coatings have the highest etch/erosion
resistance in fluorine plasma environments. They are highly
dense compared to plasma sprayed coatings, microcrystalline
and conformal, which improves device yield and the productivity
of semiconductor etch tools in a manufacturing environment.
SPECIFICATIONS
—
Substrate
Compatibility Metals, Ceramics
(e.g., Alumina, AlN)
and Semiconductors
Size Up to 1016 mm D × 508 mm H
(40” D × 20” H)
Structure
Microcrystalline
Temperature
Deposition 200°C (392°F)
Use 1000°C (1832°F)
Coating thickness
Up to 10 µm
Electrical resistivity
~ 10
12
Ω-cm
Purity
>99%
Hardness
1400 HV
Elastic modulus
160 GPa
Roughness
Conformal — substrate dependent
Wear resistance
Very good
Corrosion
resistance
Excellent etch resistance in fluorine
environments
Oxidation-resistant up to 1000°C (1832°F) in air
Resistant to most acids and alkalis
129 Concord Road
Billerica, MA 01821
USA
Tel +1 952 556 4181
Fax +1 952 556 8022
Toll Free 800 394 4083
Corporate Headquarters Customer Service
www.entegris.com
Entegris
®
, the Entegris Rings Design
®
and Pegasus
™
are trademarks of Entegris, Inc.
©2010-2016 Entegris, Inc. | All rights reserved. | Printed in the USA | 6102-5856ENT-0816
FOR MORE INFORMATION
To learn more about how Entegris’ high-purity specialty coatings help customers enhance yields,
improve productivity and meet future technological needs, call Entegris at +1 781 538 8745.
To review Entegris’ specialty coatings oering, visit Entegris’ website at www.EntegrisSpecialtyCoatings.com.
TERMS AND CONDITIONS OF SALE
All purchases are subject to Entegris’ Terms and Conditions of Sale. To view and print this information,
visit entegris.com and select the Terms and Conditions link in the footer.
CHARACTERISTICS
—
* Tested under CF
4
+0
2
reactive plasma for 4 hours.
Note: The fluorine plasma etch rate is highly non-linear with exposure
time. Pegasus coatings are expected to last 10,000 RF hours
of plasma exposure.
SEM Images of Pegasus 100 Series Coatings
Coating Surface Morphology Coating Cross-section
Etching Rate Performance*
Etch Rate (µm/hr)
3.0
2.5
2.0
1.5
1.0
0.5
0
Pegasus
100
Thin
Film
Pegasus
500
Thin
Film
Bulk
AlON
Bulk
Alumina
Bulk
AIN
Bulk
Alumi-
num
Bulk
Silicon
Bulk
Quartz
Pegasus 100