APPLICATION NOTE: Apex and Paramount RF Generator Comparison
■Advanced Energy (AE) offers a full lineup of RF plasma generators with many different features, mounts, sizes, and control methods. This application note is intended to provide a clearer picture of the AE RF generator options and highlight which is the best fit for various applications.
■For this discussion, we will focus on the two most popular Advanced Energy 13.56 MHz generators: Apex and Paramount. Both generators offer unparalleled stability, reliability, and precise process control. However, there are key differences that should be considered when selecting the appropriate product for your specific application.
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Application note & Design Guide |
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Please see the document for details |
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