Retrofit: 2 MHz, 13.56 MHz and 27.12 MHz RF Generators Simple solutions for replacing your aging RF generators with a modern replacement

PublishTime：2022-07-04

The Advanced Energy (AE) Retrofit Program aims to replace existing generators of any make and model with a new AE product. By retrofitting your existing, aged 2 MHz, 13.56 MHz or 27.12 MHz RF generator with a new Paramount® generator, Total Cost of Ownership improvements can be realized through reduced tool down time, improved process and wafer yields, and efficiency gains.
As semiconductor tools and process power components age, factories are seeing increases in failure rates and repair costs of those components. A retrofit of your existing RF generator to a Paramount provides a reset of the unit life, and an upgrade in unit capability and reliability. A retrofit maximizes tool uptime while reducing overall maintenance costs.
Many installed RF generators are discontinued, aging, or becoming difficult and costly to repair. Retrofitting with an AE Paramount is the preferred service option as:
●Used equipment available on the market is in unknowncondition
●Repairing existing units could be limited in the future due to obsolete components
●Benefits
■Increased uptime with longer mean time betweenfailures (MTBF)
■Lower overall maintenance costs
■Improved performance, equivalent to processes on new tools
■Additional features allow for enhanced process control or new process development
■Higher efficiency for decreased operating costs
■Enhanced plasma stability and process repeatability
■CEX and pulsing options available
●Features
■Includes 12-month, whole-box warranty
■Supports wafer fabrication with partnership of AE refurbishment experts
■Resets the clock on aging tools
■Provides cost-effective, modern replacement for discontinued or aging process power components
■Presents an efficient upgrade process that is replicable for subsequent tools
■Retrofit kit designed to be a seamless replacement

Brand of Product：	Advanced Energy
Part#：
Product Category：	RF Generators More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2020/2/6
Version Number：
Data Encoding：
Data Size：	132 KB

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