APEX® RF GENERATORS AND POWER-DELIVERY SYSTEMS: Sophisticated RF Conversion Technology

PublishTime：2022-03-14

●The versatile Apex® family of RF generators provides remarkably high power densityand power-delivery consistency. Sophisticated RF conversion technology not onlyoffers enhanced product and process reliability but also increases cost effectivenessby eliminating the need for front-end, DC-to-DC conversion components.Exceptionally fast and sensitive arc-handling technology also increases yield andlowers CoO. For superb performance in plasma-based, thin-film processes forsemiconductor, flat panel display, or data storage manufacturing, the Apex platformis the ideal choice. With its unique, modular design—in a package so trim it can bemounted directly on the chamber—the Apex platform is also highly customizableto suit your specific process needs.
●Benefits
■Higher power density
■Improved process flexibility
■Increased yield
■Lower CoO
■Simplified process toolintegration
■Flexible communications
●Features
■Streamlined design
■On-board chamber mount,on-tool frame mount, rackmount, and shoebox options
■Wideband control loops andoptional, high-repetition-ratepulsing
■Industry-leading arc management
■Regulatory compliant

Brand of Product：	Advanced Energy
Part#：
Product Category：	RF GENERATORS AND POWER-DELIVERY SYSTEMS More
Application：	[ Semiconductors ][ Data storage devices ][ Solar cells ][ Flat panel displays ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2018/6/13
Version Number：
Data Encoding：	ENG-Apex-210-06 0M
Data Size：	504 KB

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