Xturion™ MGE-XM™ Custom Mini Gas Enclosure
●Description
▲SEMI-GAS® supplies SEMI S2 certified, production-ready ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry and related high-tech fields. Built to address the most rigorous precision and purity demands of these specialized applications, SEMI-GAS® solutions are globally renowned for their premier levels of safety, quality, and performance.
●FEATURES
▲Specifically Designed for Small Process and Purge Gas Cylinders
▲Safely Dispenses Hazardous Process Gases
▲Automatic Shutdown in the Event of an Alarm Trip
▲Performs Purging Automatically
▲Includes Ergonomically Positioned Color Touch Screen
▲Intuitive Operating Interface
▲Continuously Monitors System Conditions for Alarms
▲Multiple Communications Protocol Available
▲Magnehelic and Pressure Switch Exhaust Detection
▲Adjustable Exhaust Ducts
▲Optional Single Source Design for Future Expansion
▲Optional Auto-Switchover Capabilities
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/8/27 |
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XTURION-MGE-XM-082016-V1 |
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1.1 MB |
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