Xturion™ Hybrix™ Custom Gas Source and Distribution System
●Description
▲SEMI-GAS® supplies SEMI S2 certified, production-ready ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry and related high-tech fields. Built to address the most rigorous precision and purity demands of these specialized applications, SEMI-GAS® solutions are globally renowned for their premier levels of safety, quality, and performance.
●FEATURES
▲Combines Source and Distribution Functionality
▲Incorporates Multiple Source Systems in One
▲Distributes Gases from Internal or External Source Supplies
▲Safely Dispenses Hazardous Process Gases
▲Performs Purging Automatically
▲Includes Ergonomically Positioned Color Touch Screen
▲Continuously Monitors System Conditions for Alarms
▲Intuitive Operating Interface and Control
▲Multiple Communications Protocol Available
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/8/27 |
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XTURION-HYBRIX-082016-V1 |
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713 KB |
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