Xturion™ Rax™ Custom Rack Mount System
●Description
▲SEMI-GAS® supplies SEMI S2 certified, production-ready ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry and related high-tech fields. Built to address the most rigorous precision and purity demands of these specialized applications, SEMI-GAS® solutions are globally renowned for their premier levels of safety, quality, and performance.
●FEATURES
▲Safely Dispenses Hazardous Process Gases
▲Configurable for Standard or Bulk Gas Delivery
▲Performs Purging Automatically
▲Performs Cylinder Switchover Automatically
▲Includes Ergonomically Positioned Color Touch Screen
▲Intuitive Operating Interface and Control
▲Continuously Monitors System Conditions for Alarms
▲Maintains Detailed Alarm Logs
▲Multiple Communications Protocols Available
▲Manual, Semi Automatic, and Fully Automatic Designs
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2017/7/13 |
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XTURION-RAX-071217-V1 |
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350 KB |
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