Xturion™ VaporX™ Custom Low Vapor Pressure Gas Source System
●Description
▲SEMI-GAS® supplies SEMI S2 certified, production-ready ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry and related high-tech fields. Built to address the most rigorous precision and purity demands of these specialized applications, SEMI-GAS® solutions are globally renowned for their premier levels of safety, quality, and performance.
●FEATURES
▲Designed for the Safe Delivery of Low Vapor Pressure Liquified Process Gases
▲Ultra High Purity Construction Suitable for Hazardous and Non-Hazardous Gas Applications
▲Performs Cylinder Switchover Automatically
▲Available in Two (C2) and Three (C3) Cylinder Models
▲Includes Ergonomically Positioned 8" Color Touch Screen
▲Intuitive Operating Interface
▲Continuously Monitors System Conditions for Alarms
▲Multiple Communications Protocol Available
Magnehelic and Pressure Switch Exhaust Detection
▲Includes Fully Automatic Gas Cylinder Heating Package
■External Heater Controller
■Cylinder Heating Blanket(s)
■Process Gas Line Heat Tracing and Insulation
▲Optional Point-of-Use Mass Flow Controller Box
■Integrated PLC Control
■Heated Low Vapor Pressure Mass Flow Controllers
▲Pneumatically Actuated Valves
▲Optional UV/IR Flame Detectors
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/8/27 |
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XTURION-VAPORX-082016-V1 |
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1 MB |
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