Nanoturion™ N4-S Semi Automatic Valve Manifold Box
●Description
▲SEMI-GAS® supplies SEMI S2 certified, production-ready ultra high purity gas source systems, distribution systems and control technology to leaders in the Semiconductor industry and related high-tech fields. Built to address the most rigorous precision and purity demands of these specialized applications, SEMI-GAS® solutions are globally renowned for their premier levels of safety, quality, and performance.
●FEATURES
▲Safely Distributes Hazardous Process Gases
▲Rail Mounted Stick Design for Easy Maintenance and Expansion
▲Automatic Shutdown in the Event of an Alarm Trip
▲Includes Line Isolation and Pressure Regulation for Individual Process Sticks
▲Gauge Based Pressure Monitoring
▲LED Lights Provide Constant System Status
▲Intuitive Operating Interface and Control
▲Continuously Monitors System Conditions for Alarms
▲4, 6 and 8 Stick Enclosures Available
▲Emergency Shut Off (ESO) Valve on Each Stick
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/8/27 |
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NANOTURION-N4-S-082016-V1 |
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1.4 MB |
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