6 英寸半绝缘型 SiC 衬底产品标准

PublishTime：2025-03-18

本文档详细描述了6英寸半绝缘型SiC衬底产品的标准规格，包括等级、直径、晶型、厚度、晶片方向、微管密度、电阻率、主定位边方向和长度、边缘去除、局部厚度变化、表面粗糙度、边缘裂纹、六方空洞、多型、目测包裹物、硅面划痕、崩边、穿透螺位错、硅面污染物和包装等方面的技术要求。

Brand of Product：	天科合达
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Product Category：	SiC 衬底 More
Application：	More
Data Type：	Technical Documentation More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
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Language：	English Chinese Chinese and English Japanese
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Data Size：	348 KB

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