Silicon Carbide (SiC) Slurries

PublishTime：2022-07-04

●Entegris is the market leader in SiC (silicon carbide) polishing slurries that are designed to meet specifications at various stages of the substrate manufacturing process from lapping to CMP for Si-face, C-face, and poly SiC wafers. Our optimized solutions for batch and single-wafer CMP systems provide a low cost of ownership and our advanced formulations provide an ultra-high polishing rate - up to 10 times faster than existing processes - while maintaining uniformity, zero sub-surface damage, and low defectivity/scratches. Our slurries are high-volume manufacturing (HVM) ready and compatible with bulk delivery systems. Custom solutions are available upon request.

Brand of Product：	Entegris
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Product Category：	Silicon Carbide (SiC) Slurries More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
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Language：	English Chinese Chinese and English Japanese
Date of Creation：	2022/4/25
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Data Size：	175 KB

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