Silicon Carbide (SiC) Slurries

PublishTime：2022-10-24

Entegris is the market leader in SiC (silicon carbide) polishing slurries specifically designed for lapping or mechanically polishing SiC wafers with Si-face, C-face, and single or polycrystalline surfaces. These slurries are optimized for batch and single-wafer CMP systems.
Our SiC slurries deliver at ultra-high polishing rates - up to 10 times faster than existing processes - with excellent uniformity. Enabled with advanced additives, they achieve atomically smooth surfaces with no sub-surface damage. Our portfolio includes products that reduce cost of ownership while maintaining low defectivity. Custom solutions are available upon request.

Brand of Product：	Entegris
Part#：	SC-2000 、 SC-HR4 、 SC-2400D 、 SCDIL4 、 SC-2200 、 SC-1T 、 SC-3100 、 MC6B 、 SC-1100 、 SC-CHF4 More Part#
Product Category：	Silicon Carbide Slurries 、 SiC Slurries More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	0221
Version Number：
Data Encoding：	9000-11144ENT
Data Size：	250 KB

Data section preview(2pages)

- The full preview is over. If you want to read the whole 3 page document,please Sign in/Register -

Download

+1 Like
Add to Favorites

Recommend

Technical Resources

More>

All reproduced articles on this site are for the purpose of conveying more information and clearly indicate the source. If media or individuals who do not want to be reproduced can contact us, which will be deleted.

Integrated Circuits