Silicon Carbide (SiC) Slurries

2022-10-24
Entegris is the market leader in SiC (silicon carbide) polishing slurries specifically designed for lapping or mechanically polishing SiC wafers with Si-face, C-face, and single or polycrystalline surfaces. These slurries are optimized for batch and single-wafer CMP systems.
Our SiC slurries deliver at ultra-high polishing rates - up to 10 times faster than existing processes - with excellent uniformity. Enabled with advanced additives, they achieve atomically smooth surfaces with no sub-surface damage. Our portfolio includes products that reduce cost of ownership while maintaining low defectivity. Custom solutions are available upon request.

Entegris

SC-2000SC-HR4SC-2400DSCDIL4SC-2200SC-1TSC-3100MC6BSC-1100SC-CHF4

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Silicon Carbide SlurriesSiC Slurries

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