Apex 3k5PIN Conversion: Conversion to Apex 3k5PIN provides 32 different operating pin positions

PublishTime：2022-07-04

The Advanced Energy (AE) Apex® 3k2PIN is a 3 kW 13.56 MHz RF generator with a pin diode matching network capable of operating in a few different impedance zones. This versatile generator is known for its power delivery consistency, high power density, and exceptional reliability. However, with only two pin diodes, the impedance matching network is limited to four pin positions.
●BENEFITS
■Cost effective approach to enhancing performance compared to new generator/match combination
■Increased impedance matching range for improved tuning of custom processes
■Converted unit is transparent from an operational standpoint
■Flexible conversion kits, each with four pre-programmed pin positions, allow custom impedance range selection while maintaining compatibility with existing tool software
■Optional graphical user interface provides on-site selection of pin positions to optimize the impedance range to each customer process position

Brand of Product：	Advanced Energy
Part#：
Product Category：	RF generator More
Application：	More
Data Type：	Supplier and Product Introduction More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	04.20
Version Number：
Data Encoding：	ENG-GS-APEX-3k5P-235-01
Data Size：	754 KB

Data section preview(2pages)

- The full preview is over. If you want to read the whole 4 page document,please Sign in/Register -

Download

+1 Like
Add to Favorites

Recommend

Technical Resources

More>

All reproduced articles on this site are for the purpose of conveying more information and clearly indicate the source. If media or individuals who do not want to be reproduced can contact us, which will be deleted.

Integrated Circuits