VAPORSORB™ ECD CHEMICAL FILTERS

PublishTime：2022-06-29

●As semiconductor process nodes have shrunk below 22 nm, the number of potential contaminants has increased, and the tolerable concentrations of those contaminants have decreased. It is necessary to protect both process equipment and wafers from the damaging effects of airborne molecular contamination.
●Entegris tool AMC filters provide complete pro-tection from common airborne molecular contami-nation (AMC) in the fab. Tool AMC filters utilize both standard filtration media and custom media blends to meet various AMC removal requirements. Entegris’ vast fab expertise ensures the right selection, application and validation of solutions. In particular, Entegris has designed ECD tool AMC filters with a balanced media blend to target acid and organic contaminants.
●Features:
■Data driven See it. Control it. methodology
■Product backed by Entegris OEM-certified, ISO 17025-accredited laboratories
■Optimized blend of high-performance adsorbents
●Benefits:
■Provides tailored, application-specific filtration solutions that are optimized for cost of ownership
■Provides assurance that all performance claims are verified with supporting data and in-field analytical support
■Provides targeted contaminant removal

Brand of Product：	Entegris
Part#：
Product Category：	VAPORSORB™ ECD CHEMICAL FILTERS More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2014/3/22
Version Number：
Data Encoding：
Data Size：	530 KB

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