VAPORSORB™ CVD CHEMICAL FILTERS
●Entegris tool AMC filters provide complete pro-tection from common airborne molecular contami-nation (AMC) in the fab. Tool AMC filters utilize both standard filtration media and custom media blends to meet various AMC removal requirements. Entegris’ vast fab expertise ensures the right selection, application and validation of solutions. In particular, Entegris has designed CVD tool AMC filters with a balanced media blend to target organic contaminants.
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2014/3/22 |
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530 KB |
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