Pegasus™ 500 Series Coatings
●Pegasus 500 series coatings can be deposited on aluminum, alumina, stainless steel and other commonly used substrate materials, with superior adhesion. These coatings are highly transparent in the visible and IR range. They are of high purity, exhibit homogeneous microstructure and are conformal to the substrate surface.
●Entegris’ Pegasus 500 series coatings are dense and excellent barriers to corrosive chemistries in a semiconductor etch environ-ment, protecting surfaces from erosion and minimizing particle generation. The coatings are superior in etch resistance performance compared to plasma sprayed coatings since they are dense, have good cohesive strength and are not prone to particulation. This improves device yield and improves productivity of semiconductor etch tools in a manufacturing environment.
●BENEFITS:
■Fluorine and chlorine etch resistance
■Oxidation resistance
■Low particle generation
■Dense and transparent
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2016/11/17 |
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325 KB |
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