627F Heated (45°C) Absolute Baratron® Capacitance Manometer

PublishTime：2022-04-21

●The 627F Baratron® capacitance manometer is heated to 45°C, accurate to 0.12% of Reading and includes updated temperature-control electronics to provide superior long-term stability and repeatability. Optional heater and temperature status LED/switches indicate that the heater (which maintains the sensor temperature to 45°C) is in control. This capacitance manometer is available in Full Scale ranges down to 20 mTorr (0.03 mbar) to accommodate today’s lower process pressures.
●Based on established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627A, 627B, and 627D Baratron capacitance manometers and can be used with MKS power supplies, display units and pressure controllers, or other compatible power supply/readout devices.
●Product Features
■Excellent long-term stability
■Percent of Reading accuracy for more precise output signal in lower pressure ranges
■Full Scale ranges low as 20 mTorr (0.03 mbar) for precise measurement of low pressure processes
■All-Inconel corrosion-resistant wetted surfaces
■Integrated sump (US patent #5,822,685) provides particle protection
■Faster warm-up time
■Visual and electrical status of temperature and heater control circuit
■Compatible with earlier Baratron capacitance manometers, MKS power supply/readout modules, and pressure controllers

Brand of Product：	MKS Instruments
Part#：	627F More Part#
Product Category：	Heated (45°C) Absolute Baratron® Capacitance Manometer More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	8/21
Version Number：
Data Encoding：
Data Size：	2.6 MB

Data section preview(2pages)

- The full preview is over. If you want to read the whole 4 page document,please Sign in/Register -

Download

+1 Like
Add to Favorites

Recommend

Technical Resources

More>

All reproduced articles on this site are for the purpose of conveying more information and clearly indicate the source. If media or individuals who do not want to be reproduced can contact us, which will be deleted.

Integrated Circuits