627F Heated (45°C) Absolute Baratron® Capacitance Manometers 24VDC (20.0-31.5 VDC) AND PROFIBUS® OPTIONS

PublishTime：2022-04-18

●The 627F Baratron® capacitance manometer is heated to 45C, accurate to 0.12% of Reading and includes updated temperature control electronics to provide superior long-term stability and repeatability. The 24V (20.0 to 31.5 VDC) analogue 1 Profibus Version capacitance manometer is available in Full Scale ranges down to 0.1 mbar 1 Torr.
●Based on established Baratron capacitance manometer technology, the sensor's wetted surfaces are Inconel® for excellent resistance to corrosive gases. The contemporary stainless steel package provides a cleanroom-compatible product. The product is interchangeable with earlier 627 Baratron capacitance manometers both analogue and Profibus and can be used with MKS power supplies, display units and pressure controllers, or the user's compatible power supply/readout devices. The 627F 24V analogue version has a 15-pin D-subminiature electrical connector, and the 627F Profibus version has two 9-pin D-subminiature electrical connectors.
●Features & Benefits
■Accurate
▲Excellent long-term stability
▲Percent of Reading accuracy for more precise output signal in lower pressure ranges
▲Full Scale ranges low as 0.1 mbar / Torr for precise measurement of low pressure processes
▲Measures total pressure directly, independent of gas composition
■Robust
▲All-Inconel corrosion-resistant wetted surfaces
▲Integrated sump (US patent #5,822,685)provides particle protection
▲Fast warm-up time
▲High overpressure rating for improved reliability
■Compatible
▲Cleanroom-compatible stainless steel package
▲Compatible with earlier Baratron capacitance manometers, MKS power supply/readout modules, and pressure controllers
■Communication
▲Analogue with output signal 0- 10 VDC
▲Profibus DPV1 optional
■Power Requirements
▲Operates from 20.0 to31.5 VDC

Brand of Product：	MKS Instruments
Part#：	627F 、 627F01MBC9B More Part#
Product Category：	Absolute Baratron® Capacitance Manometers More
Application：	[ semiconductor manufacturing ][ metal etching ][ nitride film chemical vapor deposition (CVD) ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	3/19
Version Number：
Data Encoding：
Data Size：	809 KB

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