Vision 2000-A XD High Sensitivity RGAs for ALD and CVD Processes

PublishTime：2022-04-18

■The Vision 2000-A XD Residual Gas Analyzer (RGA) improves process productivity and product quality by providing real-time tracelevel monitoring of various gas species, including precursors, reactionbyproducts, and contaminants during ALD and CVD processes. The Vision 2000-A XD system incorporates MKS’ patented V-lens™technology, taking the proven performance of the Vision 2000-A XD system to a higher level of sensitivity and reliability, previously unachievable with conventional quadrupole mass spectrometry systems (QMS). The V-lens design provides increased sensitivity and reproducibility for the most challenging applications, such astracking levels of various gas species or reaction byproducts during ALD and CVD deposition processes. With V-lens technology, process engineers can identify and prevent potentially costly issues faster and easier while maximizing yield.
■The new Modular UniBloc™ Inlet operates at up to 200°C, preventing precursor condensation and inlet blockage, as well as improving inlet lifetime (MTTM). The new, custom inlet design eliminates sampling gas delivery delays with minimum internal volumes and surface areasresulting in fast response to dynamic gas chemistries. A sample variety of sample transfer tubes can be attached directly to the inlet face further improving both response time and sampling fidelity from the pointof interest. Additionally, the new design makes field maintenance of valvesand flow elements quick, easy and cost effective. Fast scanning electronics allow a wide dynamic range of each scan to monitor process gases and trace byproducts, supporting the fast monitoring needed for ALD.
■Vision 2000-A XD RGA’s high sensitivity V-lens technology, improved electronics with fast and wide dynamic range scanning capabilities, and minimized internal volume and surface area for improved gas delivery speeds, make the Vision 2000-A XD the choice to support monitoring short ALD pulse cycles.
●Product Features
■Modular UniBloc inlet with all metal seals and field serviceable parts
■Temperature inlet, up to 200°C (consult the factory for models up to 300°C)
■V-lens ion optics technology
■Process Eye™ Professional software for data acquisition, interpretation, recall, and intelligent alarming
■TOOLweb® RGA software for automated monitoring of semiconductor tools (available option)
●Key Benefits
■High temperature inlet enhances lifetime by preventing precursor condensation and process byproduct buildup
■Fast response UniBloc inlet, with rapid scanning electronics, provides quick monitoring of ALD process chemistries
■Detects trace amounts of ALD reaction byproducts (~15ppb) with V-lens technology providing improved process byproduct and contamination sensitivity
■Double filter options improve contamination resistance and increased high mass transmission of precursor and fragment ions
■Sampling inlet, ion source, mass filter, and reducing the sampling gas into RGA with the low detection limit of V-lens technology result in long lifetime

Brand of Product：	MKS Instruments
Part#：	Vision 2000-A XD More Part#
Product Category：	High Sensitivity RGA More
Application：	[ ALD ][ CVD deposition processes ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	01/22
Version Number：
Data Encoding：
Data Size：	2.7 MB

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