Vision 2000-A RGA for ALD and CVD Processes
■The new Modular UniBloc™ Inlet operates up to 200°C, preventing precursor condensation and inlet blockage, as well as improving inlet lifetime (MTTM). The new inlet design eliminates sampling gas delivery delays with minimum internal volumes and surface areas resulting in fast response to dynamic gas chemistries. A variety of sample transfer tubes can be attached directly to the inlet face further improving both response time and sampling fidelity from the point of interest. Additionally, the new design makes field maintenance of valves and flow elements quick, easy and cost effective. Fast scanning electronics allow a wide dynamic range of each scan to monitor process gases and trace byproducts, supporting the fast monitoring needed for ALD.
■The RGA’s quick, wide dynamic range electronic scanning capabilities, combined with a mechanical design that minimizes internal volume and surface area to improve gas delivery speeds,make the Vision 2000-A the choice for monitoring short ALD pulse cycles.
●Product Features
■Modular UniBloc inlet with all metal seals and field serviceable parts
■Temperature inlet up to 200°C (consult the factory for models up to 300°C)
■Direct coupling for a sample transfer tube
■Process Eye™ Professional software for data acquisition, interpretation, recall, and intelligent alarming
■TOOLweb® RGA software for automated monitoring of semiconductor tools (available option)
●Key Benefits
■High temperature inlet enhances lifetime by preventing precursor condensation and process byproduct buildup
■Fast response modular UniBloc inlet, with rapid scanning electronics, provides quick monitoring of ALD process chemistries
■Double filter option improves contamination resistance and increases high mass transmission of precursor and fragment ions
■Sampling inlet, ion source, mass filter and control of the sampling gas result in long lifetime
■Improved service life and ease of maintenance
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[ ALD ][ CVD processes ] |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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01/22 |
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2.9 MB |
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