Gasfil 高温超纯气体过滤器

PublishTime：2025-03-18

Gasfil系列超纯气体过滤器是专为半导体制程超高纯工艺气体在线过滤应用设计的产品。该过滤器采用整体316L不锈钢结构，具有超高颗粒拦截效率，适用于高温和动态高压应用。其过滤精度可达0.003μm，适用于多种工艺气体，并在洁净室环境内制造、测试、包装。产品通过了100%完整性和氦气泄露检测。

Brand of Product：	Feature-Tec
Part#：	Gasfil More Part#
Product Category：	超纯气体过滤器 More
Application：	[ 半导体制程超高纯工艺气体在线过滤 ] More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：	316L不锈钢
Language：	English Chinese Chinese and English Japanese
Date of Creation：
Version Number：
Data Encoding：
Data Size：	421 KB

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