Ultra High Purity Gas Filter

PublishTime：2025-03-20

The Uni-Lok GF Series gas filter is designed to meet the stringent requirements of SEMI E49.8-96 for gas filtering applications. It features a 316L VAR stainless steel housing and a sintered construction filter element made of 316L SS. The filter offers high particle removal efficiency and is fully welded for a compact design. Each filter is helium leak tested to ensure quality. The components are cleaned with deionized water after passivation, adhering to the UNIP-705-38 cleaning process. The GF Series is suitable for high-purity applications and comes with a range of specifications including removal rating, rated flow, maximum working pressure, and operating temperature.

Brand of Product：	上海飓亚
Part#：	GF Series More Part#
Product Category：	Gas Filter More
Application：	[ UHP application ][ SEMI E49.8-96 compliant ] More
Data Type：	Selection guide More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	JAN. 2013
Version Number：
Data Encoding：
Data Size：	218 KB

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