BENEQ P800 production-proven batch ALD system

PublishTime：2024-12-03

●The Beneq P800 is a production-proven batch ALD system perfect for industrial manufacturing. Boasting a vacuum chamber with a diameter of 800 mm, this tool provides ample space for high volume coating production while still providing excellent batch uniformity. It is ideal for depositing thick optical coatings and etch-resistant barrier films.
●Example substrates include:
■Semiconductor chamber lids, liners & showerheads
■Printed circuit boards
■Large optical domes and freeform optics

Brand of Product：	BENEQ
Part#：	P-Series 、 P400A 、 P800 、 P1500 More Part#
Product Category：	Batch Production Equipment 、 production-proven batch ALD system 、 World’s biggest ALD system More
Application：	[ diverse substrate types ][ thick films ][ industrial manufacturing ][ depositing thick optical coatings ][ etch-resistant barrier films ] More
Data Type：	Supplier and Product Introduction More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2022/8/8
Version Number：
Data Encoding：
Data Size：	432 KB

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