BENEQ P1500 ALD reactor

PublishTime：2024-12-03

●The Beneq P1500 is the world’s largest ALD reactor. With a vacuum chamber width of 1.7 meters, this tool is uniquely designed to coat very wide area substrates and large batches of 3D components. As the latest innovation in Beneq’s P-Series, the P1500 continues to enable ALD on the biggest scale with viable high-volume manufacturing solutions.
●Example substrates include:
■Generation 4 to 6 display glass
■Photovoltaic glass sheets
■Astronomical mirrors
■Semiconductor chamber lids, liners & showerheads
■Printed circuit boards

Brand of Product：	BENEQ
Part#：	P1500 、 P400A 、 P800 、 P-Series More Part#
Product Category：	ALD reactor 、 3D & Batch Equipment 、 World’s biggest ALD system More
Application：	[ diverse substrate types ][ thick films ][ industrial batch production ][ manufacturing ] More
Data Type：	Supplier and Product Introduction More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2022/3/21
Version Number：
Data Encoding：
Data Size：	1.4 MB

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