BENEQ C2R cluster-compatible spatial ALD tool

PublishTime：2024-12-03

●The Beneq C2R is a cluster-compatible spatial ALD tool equipped with a continuous rotary mechanism and robust plasma-enhancement. With rotation speeds up to 200 rpm and in-situ optical broadband monitoring (BBM), C2R is the perfect production tool for high throughput optical coatings with tailored plasma ALD processes.
●Example substrates include:
■Optical domes
■High curvature lenses
■Polymer optics e.g., mobile phone camera lenses
■200 mm wafers

Brand of Product：	BENEQ
Part#：	C2R 、 Genesis ALD More Part#
Product Category：	cluster-compatible spatial ALD tool 、 World’s only commercially available roll-to-roll ALD system 、 Plasma-enhanced spatial ALD 、 Spatial ALD Equipment More
Application：	[ high throughput optical coatings ][ optical coatings ][ batteries ][ solar ] More
Data Type：	Supplier and Product Introduction More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2023/2/9
Version Number：
Data Encoding：
Data Size：	691 KB

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