Advansic SiC Ceramic Parts
■Fewer metal contamination on wafers
■Excellent outgas performance and few particles
■Excellent cooling rate and thermal response
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SiC Ceramic Parts 、 Shower plate 、 Focus ring 、 Susceptor 、 wafer holder |
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[ Plasma Etch system ][ Plasma Etch apparatus ][ Plasma CVD apparatus ][ thermal CVD apparatus ][ Thermal processing apparatus ] |
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2022/10/21 |
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154 KB |
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