IWH Wafer Handling Robot with SHD super heavy duty dual arm and SHD body

2022-10-09
■Characteristics
●excellent structural rigidity
●wafer handling of up to 450 mm
●maximum reliability and precision
●easy connection of a linear track to the robot controller
●very smooth running
●backlash free harmonic drive gears
●absolute or incremental encoder
●fully integrated software ajustable vacuum sensors (advanced controller)
●including "Advanced" controller and software
●ISO 1 clean-room environment compatible
●MTbF: > 50,000 operating hours
●option: 2 flip modules iFM-300-3

isel Germany AG

IWH F-3 SHD

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Part#

Wafer Handling Robot

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Datasheet

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Please see the document for details

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English Chinese Chinese and English Japanese

2017/11/13

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