IWH Wafer Handling Robot with SHD super heavy duty dual arm and SHD body
●excellent structural rigidity
●wafer handling of up to 450 mm
●maximum reliability and precision
●easy connection of a linear track to the robot controller
●very smooth running
●backlash free harmonic drive gears
●absolute or incremental encoder
●fully integrated software ajustable vacuum sensors (advanced controller)
●including "Advanced" controller and software
●ISO 1 clean-room environment compatible
●MTbF: > 50,000 operating hours
●option: 2 flip modules iFM-300-3
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2017/11/13 |
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513 KB |
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