IWH Series 3 Wafer Handling Robot
●excellent structural rigidity and precision
●maximum reliability
●top mounted (TA) or bottom mounted (bA) versions available
●customized designs
●absolute or incremental encoder
●seamless integration with prealigner, linear track and other periphal components
●including "Standard" or "Advanced" controller and software
●MTbF: > 50,000 operating hours
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Datasheet |
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Please see the document for details |
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English Chinese Chinese and English Japanese |
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2017/11/13 |
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335 KB |
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