LPA Series Prealigners

PublishTime：2022-10-09

The LPA series prealigners are an innovative, high-precision, class 1 clean room solution with integrated scan electronics.These prealigners make it possible to align objects from 45 mm to 480 mm, regardless of their degree of transparency.They centre wafers, masks and other substrates, detect notches, flats or other marks and align the object exactly and independently.
The prealigners are developed and produced by Logosol Inc. USA. isel Germany AG is the exclusive authorised distributor for Europe.
■Features
●Three-axis prealigners
▲innovative all-in-one design
▲alignment times < 3.5 seconds
▲repeatability: linear 0.025 mm, circular 0.02°
▲contactless measurement using Led and CCD sensor
▲integrated scanning electronics
▲standalone capability
▲chuck or pin load and change to another wafer size without rebuild
▲transparent, semi-transparent, holed and opaque wafers can be aligned
▲SeMI, flat and notch wafer specifications
▲for wafer sizes from 2" to 18"
▲connection fields available from the side and from below
▲option: external (notch sensor)
▲option: dual layer for bonded wafer
●Single-axis prealigner
▲alignment times < 2.5 seconds
▲contactless measurement using Led and CCD sensor
▲integrated scanning electronics
▲chuck load
▲change to another wafer size without rebuild
▲transparent, semi-transparent, holed and opaque wafers can be aligned
▲SeMI, flat and notch wafer specifications
▲for wafer sizes from 3" to 12"
▲connection fields available at the side and from below

Brand of Product：	isel Germany AG
Part#：	LPA Series 、 LPA 、 26-3 、 38-3 、 58-3 、 312-3 、 812-3 、 1218-3 、 25-1E 、 38-1E 、 58-1E 、 312-1E 、 812-1E 、 1218-1E More Part#
Product Category：	Prealigners More
Application：	More
Data Type：	Datasheet More
Safety & Environment Standards：	More
Operating Temperature：	Please see the document for details
Qualification Grade：	More
Qualification Approval：	More
Package：
Language：	English Chinese Chinese and English Japanese
Date of Creation：	2017/11/13
Version Number：
Data Encoding：
Data Size：	245 KB

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