RF CALIBRATION SOLUTIONS

2022-07-04
Advanced Energy offers regular calibration of your RF generators and matches, keeping your precise RF sensors within specification and ensuring your tools are operating at their highest potential.
RF power measurement is a crucial part of semiconductor processing as it provides the full picture of your plasma characteristics. Maintaining measurement accuracy ensures your equipment is operating within design specifications and allows you to refine and optimize your precise process steps. Even the most expensive or technologically advanced equipment will see reduced performance if not properly calibrated and that calibration maintained.

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2021/2/4

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